The core technology in Optron Systems’s portfolio is our integrated VLSI-MEMS membrane mirror spatial light modulator (VLSI-MMLM) for high-performance infrared scene projection, with additional applications in general projection displays and adaptive optics / wavefront correction.

VLSI-MMLM chips on interface cards

VLSI-MMLM devices consist of a membrane mirror fabricated in our hybrid polymer MEMS process over an integrated high-voltage VLSI driver array, which supports high framerate flicker-free operation. Our flexible fabrication process allows the creation of a wide range of pixel sizes and pitches using a common driver platform.

The membrane mirror light modulator forms a diffractive phase-only optical element with individually controllable pixels. Using electrostatic actuation, the membrane mirror surface is deformed in a controlled manner, creating a programmable pattern of diffraction loci. The mirror surface is completely continuous, lacking etch release holes or pixel clearance spaces. Its surface is metallized with a 100% fill factor, enabling our devices to tolerate high optical power with reduced parasitic absorption.

Current MMLM devices in development include:

  • 20 mm square substrate
    200 x 200 array of 100 µm pixels
    500 x 500 array of 40 µm pixels
    1000 x 1000 array of 20 µm pixels

  • 46 mm square large-format substrate
    384 x 384 array of 120 µm pixels
    768 x 768 array of 60 µm pixels

  • Other configurations available as requirements dictate.

For further details, please refer to our MMLM / IR scene projection white paper.

Interested parties in the spatial light modulator technologies under development are encouraged to contact us at with questions and requirements, or to schedule a prototype demonstration.